Paper Title
Shape Measurement Analysis of Indium Tin Oxide Thin Film by Sinusoidal Phase Modulating Interferometry Techniques
Abstract
This paper presents the interference signal of sinusoidal phase modulating interferometry (SPMI) and its Fourier
transform are derived. Based on these equations, a new method for elimination of a dispersion effect in SPMI is proposed to
measure exactly a reflecting surface position.Sinusoidal phase modulating interferometer to realize real-time surface profile
measurement is proposed, and its measuring principle is analyzed theoretically with simulation. The surface shape is derived
from the frequency components of the detected interference signal. Then, the surface shape of Indium tin oxide (ITO) thin
film is measured. Measurement accuracy exact to nanometer range can be obtained by using this sinusoidal phase
modulatinginterferometry. The impartial of this research is to accomplish enhanced of the thin film shape measurement in
the range of nanometer skill.The surface shape of the sample was experimentally measured to an accuracy of less than
100nm range.
Keywords - Interferometry, ITO,Nanometer, Shape Measurement, Sinusoidal Phase Modulating Interferometry, SPMI, Thin
Film.